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Mechanism-Based Approaches for CVD/ALD of Cu Barriers
Sponsoring Agency:
NATL SCIENCE FO
Investigators
Lisa McElwee-White
Crow Professor And Chair
Ls-Chemistry-General | College-Liberal Arts/Sciences
3523925266
lmwhite@chem.ufl.edu
Timothy Anderson
Dist. Prof. & Director, Fesc
Eg-Fesc-Administration | College-Engineering
352-392-0947
tim@ufl.edu
Funding
Award
$415,000.00
Begin Date
September 1, 2009
End Date
August 31, 2013
Research Terms
Engineering
Chemistry
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