Piezoelectric MEMS Resonator Platform Offers Better Performance at Lower Cost

Abstract

The University of Central Florida invention is a new class of piezoelectric microelectromechanical system (MEMS) resonators using a temperature-stable and very high-quality factor (low noise) platform. The thin-film suspended microacoustic resonators are engineered on low-cost substrates, making them very commercially attractive.

Quartz resonators enable precise frequency control in timing applications but are costly, large, and offer limited flexibility. One alternative is MEMS resonators which are typically capacitively driven and result in higher loss and increased power consumption. MEMS resonators are also sensitive to temperature fluctuations, leading to frequency drift and reduced accuracy. One other alternative is piezoelectrically driven MEMS resonators, which can provide lower loss and potentially better noise performance. However, the devices show temperature stability and noise performance that should be addressed before being considered viable replacements for both quartz and current capacitive MEMS options.

As a solution, the UCF invention addresses the noise performance and temperature stability of MEMS by using a novel piezoelectric on a substrate resonant structure. The innovation comprises a relatively thick, low-loss substrate with a thin-film piezoelectric overlay.

The piezoelectric film not only provides the transduction mechanism but also functions as an anchor for holding the resonant body (comprising at least the thick substrate, thin-film piezoelectric, and one or more electrodes) suspended and attached to the substrate. This anchoring configuration solves the long-standing problem of increased noise of piezoelectric MEMS resonators due to anchor loss, which is the loss of acoustic (mechanical) energy through the anchoring points.

Partnering Opportunity: The research team is seeking partners for licensing, research collaboration, or both.

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