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Nikon Stepper
Sponsoring Agency:
Lucent Technologies Inc.
Investigator
Marion Soileau
Finance Business Center - CREOL, College Of Optics and Photonics
mj@ucf.edu
Funding
Award
$5,667,127.00
Begin Date
February 14, 2000
End Date
June 30, 2000
Research Terms
Commerce
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