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METASTABLE DOPANT ACTIVATION OF ION IMPLANTED BORON
Sponsoring Agency:
SEMICONDUCTOR RESEARCH COR
Investigator
Mark Law
Prof. And Director Of The Honors Pr
Eg-Materials Sci Engineering | College-Engineering
352-392-1519
mlaw@ufl.edu
Funding
Award
$9,011.00
Begin Date
September 1, 1998
End Date
August 31, 2001
Research Terms
Engineering
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