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DUV Laser Plasma Studies
Sponsoring Agency:
KLA-Tencor Corporation
Investigator
Martin Richardson
Dean's Office - General - CREOL | College Of Optics And Photonics
mcr@creol.ucf.edu
Funding
Award
$526,806.00
Begin Date
October 10, 2011
End Date
October 1, 2015
Research Terms
Physical Sciences
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