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Co, Ni, Ru, and W as Alternate Interconnects for sub-30nm Linewidths
Sponsoring Agency:
Semiconductor Research Corporation
Investigator
Kevin Coffey
Member
Materials Science And Engineering | Ucf/College Of Engineering And Computer Science
407-823-2175
krcoffey@ucf.edu
Funding
Award
$271,000.00
Begin Date
July 1, 2012
End Date
November 30, 2015
Research Terms
Applied Physics
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