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Project

MRI: Acquisition of a Hybrid Mask-Aligner/Nanoimprinter Lithography Tool
Principal Investigator: Sasan Fathpour
University of Central Florida
CREOL, The College of Optics and Photonics
407-823-6961
Co-Investigator: Peter Delfyett
University of Central Florida
College of Optics and Photonics

Co-Investigator: Masa Ishigami
University of Central Florida
College of Sciences
(510)301-8798
Co-Investigator: Winston Schoenfeld
University of Central Florida
Office of Research

Sponsoring Agency: National Science Foundation
Award: $502,863
Begin Date: 08-15-2013
End Date: 07-31-2015
Project Research Terms: Engineering > Electronics > Quantum Electronics

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