Home
About Us
FAQ
Contact Us
Media Tools
ExpertConnect App
MyExpertNet
University Partners
Becoming a Partner
Key Organizations
Search Assistance
Help
Project Profile
Share
QR code
GOALI: Investigating Metrology Issues in Chemical Mechanical Planarization Process for Microelectronic Manufacturing
Sponsoring Agency:
National Science Foundation
Investigator
Ashok Kumar
Professor
Mechanical Engineering | College Of Engineering
(813) 974-2011
kumar@usf.edu
Funding
Award
$265,000.00
Begin Date
August 1, 2002
End Date
July 31, 2003
Research Terms
Mechanical Engineering
Keyword Search
Please enter valid search criteria.
Search
Centers
Experts
Projects
Speakers
Stories
Technologies
Videos
University
All Universities
Florida A&M University
Florida Atlantic University
Florida Gulf Coast University
Florida Institute of Technology
Florida International University
Florida State University
University of Central Florida
University of Florida
University of Miami
University of North Florida
University of South Florida
University of West Florida
Browse by STEM
Biotechnology
Computer Science
Energy
Engineering
Environmental Sciences
Information Science
Life Sciences
Mathematics
Medical Sciences
Military Sciences
Natural Sciences
Physical Sciences
Plant Sciences
Science
Space Sciences
Technology
Transportation
