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3-D Dopant Profiles of Halo/Extension Regions
Sponsoring Agency:
SEMICONDUCTOR RESEARCH COR
Investigator
Kevin Jones
Prof & Past-Chr
Eg-Materials Sci Engineering | College-Engineering
352-846-3301
kjones@eng.ufl.edu
Funding
Award
$150,000.00
Begin Date
September 1, 2007
End Date
October 31, 2011
Research Terms
Materials Characterization
Industries
Advanced Materials & Products
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