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Rapid Atom Probe 3-D Dopant Profiling of Fin Structures
Sponsoring Agency:
APPLIED MATERIAL
Investigator
Kevin Jones
Prof & Past-Chr
Eg-Materials Sci Engineering | College-Engineering
352-846-3301
kjones@eng.ufl.edu
Funding
Award
$314,000.00
Begin Date
September 1, 2014
End Date
August 31, 2018
Research Terms
Materials Characterization
Materials Processing
Industries
Advanced Materials & Products
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